Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Photo-mask and method of exposing and projection-exposing apparatus

Photo-mask and method of exposing and projection-exposing apparatus

US Patent 6249335 · Granted Jun 19, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Exposure apparatus, exposure method, method for producing device, and optical pa2018
Exposure method, exposure apparatus, and method for producing device2018
Exposure apparatus, exposure method, and method for producing device2018
Illumination optical apparatus having deflecting member, lens, polarization memb2018
Exposure method, substrate stage, exposure apparatus, and device manufacturing m2017
Illumination optical apparatus and projection exposure apparatus2017
Illumination optical apparatus having distribution changing member to change lig2017
Exposure method, exposure apparatus, and method for producing device2016
Illumination optical apparatus and projection exposure apparatus2016
Illumination optical apparatus and projection exposure apparatus2016
Exposure apparatus, exposure method, and method for producing device2016
Exposure method, substrate stage, exposure apparatus, and device manufacturing m2016