Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator

Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator

US Patent 9885959 · Granted Feb 6, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Exposure apparatus, exposure method, method for producing device, and optical pa2018
Exposure method, exposure apparatus, and method for producing device2018
Exposure apparatus, exposure method, and method for producing device2018
Exposure method, substrate stage, exposure apparatus, and device manufacturing m2017
Illumination optical apparatus having distribution changing member to change lig2017
Illumination optical apparatus having distribution changing member to change lig2017
Exposure method, exposure apparatus, and method for producing device2016
Exposure apparatus, exposure method, and method for producing device2016
Exposure method, substrate stage, exposure apparatus, and device manufacturing m2016
Exposure apparatus, exposure method, method for producing device, and optical pa2015
Exposure method and apparatus, and method for fabricating device with light amou2015
Exposure method and apparatus, and method for fabricating device with light amou2015