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Home › Disposable gate/replacement gate MOSFETs for sub-0.1 micron gate length and ultra-shallow junctions

Disposable gate/replacement gate MOSFETs for sub-0.1 micron gate length and ultra-shallow junctions

US Patent 6180978 · Granted Jan 30, 2001

Estimated economic value: $121,735,000 ⓘ

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