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Home › Trench isolation process using nitrogen preconditioning to reduce crystal defects

Trench isolation process using nitrogen preconditioning to reduce crystal defects

US Patent 6118168 · Granted Sep 12, 2000

Estimated economic value: $304,851,000 ⓘ

Assignee

Intel

Inventors

Peter K. Moon (31 patents)
David Krick (4 patents)
Kerry Spurgin (5 patents)

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