Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7504185 | Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithography | Yoshiaki Ikuta, Hsing Chign Ma | 2009-03-17 |
| 6118168 | Trench isolation process using nitrogen preconditioning to reduce crystal defects | Peter K. Moon, Kerry Spurgin | 2000-09-12 |
| 5985735 | Trench isolation process using nitrogen preconditioning to reduce crystal defects | Peter K. Moon, Kerry Spurgin | 1999-11-16 |
| 5719085 | Shallow trench isolation technique | Peter K. Moon, Berni W. Landau | 1998-02-17 |