Patents per Year
Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7504185 | Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithography | Yoshiaki Ikuta, Hsing Chign Ma | 2009-03-17 | |
| 6118168 | Trench isolation process using nitrogen preconditioning to reduce crystal defects | Peter K. Moon, Kerry Spurgin | 2000-09-12 | $304,851,000 |
| 5985735 | Trench isolation process using nitrogen preconditioning to reduce crystal defects | Peter K. Moon, Kerry Spurgin | 1999-11-16 | $116,169,000 |
| 5719085 | Shallow trench isolation technique | Peter K. Moon, Berni W. Landau | 1998-02-17 | $169,432,000 |