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Home › Controlled linewidth reduction during gate pattern formation using a spin-on barc

Controlled linewidth reduction during gate pattern formation using a spin-on barc

US Patent 5965461 · Granted Oct 12, 1999

Estimated economic value: $2,065,000 ⓘ

Assignee

AMD

Inventors

Chih-Yuh Yang (71 patents)
Scott A. Bell (105 patents)
Daniel A. Steckert (6 patents)

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