Double-sided substrate cleaning apparatus and cleaning method using the same

Assignee

• Tokyo Electron Limited
• Tokyo Electron Kyushu Limited

Inventors

• Hiroyuki Matsukawa (90 patents)
• Akira Yonemizu (20 patents)
• Michiaki Matsushita (15 patents)
• Akihiro Fujimoto (75 patents)
• Takashi Takekuma (18 patents)
• Hidetami Yaegashi (40 patents)
• Takahide Fukuda (7 patents)

View full patent text on Google Patents →