Magnetron plasma processing apparatus and processing method

Assignee

• Tokyo Electron Limited
• Kabushiki Kaisha Toshiba

Inventors

• Hiromi Harada (13 patents)
• Sinji Kubota (4 patents)
• Hiromi Kumagai (9 patents)
• Junichi Arami (38 patents)
• Keiji Horioka (50 patents)
• Isahiro Hasegawa (32 patents)
• Haruo Okano (90 patents)
• Katsuya Okumura (296 patents)
• Yukimasa Yoshida (27 patents)

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