Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Microlithographic structure with an underlayer film containing a thermolyzed azide compound

Microlithographic structure with an underlayer film containing a thermolyzed azide compound

US Patent 5783361 · Granted Jul 21, 1998

Estimated economic value: $12,143,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Forming multiple aerial images in a single lithography exposure pass2024
Method and apparatus for imaging using narrowed bandwidth2023
Forming multiple aerial images in a single lithography exposure pass2022
Multifunctional polymers2022
Optimization of source and bandwidth for new and existing patterning devices2019
Negative-tone resist compositions and multifunctional polymers therein2019
Wafer-based light source parameter control2019
Adhesive resins for wafer bonding2019
Control of a spectral feature of a pulsed light beam2018
Wafer-based light source parameter control2018
Fluorinated sulfonate esters of aryl ketones for non-ionic photo-acid generators2018
Non-ionic low diffusing photo-acid generators2018