Polishing apparatus including cloth cartridge connected to turntable

Assignee

• Ebara
• Kabushiki Kaisha Toshiba

Inventors

• Toyomi Nishi (23 patents)
• Manabu Tsujimura (57 patents)
• Tamami Takahashi (48 patents)
• Hiromi Yajima (28 patents)
• Riichiro Aoki (10 patents)
• Yukio Imoto (7 patents)
• Shoichi Kodama (12 patents)
• Kazuaki Himukai (5 patents)
• Gisuke Kouno (7 patents)
• Takanobu Nishimura (16 patents)

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