Pattern evaluation apparatus and a method of pattern evaluation

Assignee

• Kabushiki Kaisha Toshiba
• Topcon

Inventors

• Mitsuo Tabata (19 patents)
• Toru Tojo (47 patents)
• Kiminobu Akeno (12 patents)
• Toshiyuki Watanabe (157 patents)
• Tomohide Watanabe (7 patents)
• Eiji Yamanaka (28 patents)
• Chikara Itoh (3 patents)
• Makoto Taya (5 patents)

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