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Home › Pretreatment process for treating aluminum-bearing surfaces of deposition chamber prior to deposition of tungsten silicide coating on substrate therein

Pretreatment process for treating aluminum-bearing surfaces of deposition chamber prior to deposition of tungsten silicide coating on substrate therein

US Patent 5482749 · Granted Jan 9, 1996

Estimated economic value: $27,163,000 ⓘ

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