Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Low particulate reliability enhanced remote microwave plasma discharge device

Low particulate reliability enhanced remote microwave plasma discharge device

US Patent 5262610 · Granted Nov 16, 1993

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for measuring contamination in liquids at PPQ levels2010
Apparatus and method for multi-target physical-vapor deposition of a multi-layer2005
Rapid cycle chuck for low-pressure processing2004
Method and apparatus for stretching and processing saw film tape after breaking 2004
Chemical solution and method for reducing the metal contamination on the surface2003
Edge sealing structure for substrate in low-pressure processing environment2003
Thin-film processing electromagnet with modified core for producing low-skew mag2002
Method and apparatus for thin film deposition using an active shutter2002
Physical vapor deposition system having reduced thickness backing plate2001
Isolation structure and method2001
Method of magnetically orienting thin magnetic films with a multiple-coil electr2000
Trench isolation of a CMOS structure2000