Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Positively operating radiation-sensitive mixture containing a polyfunctional .alpha.-diazo-.beta.-keto ester and radiation-sensitive recording material containing this mixture

Positively operating radiation-sensitive mixture containing a polyfunctional .alpha.-diazo-.beta.-keto ester and radiation-sensitive recording material containing this mixture

US Patent 5198322 · Granted Mar 30, 1993

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Top-layer membrane formation composition and method for forming resist pattern u2019
Composition for forming overlay film, and resist pattern formation method employ2017
Composition for forming topcoat layer and resist pattern formation method employ2017
Aromatic imide compound and method for producing same2016
Aromatic imide compound and method for producing same2016
Composition for forming topcoat layer and resist pattern formation method employ2016
Composition for forming fine pattern and method for forming fined pattern using 2016
Rinse solution for lithography and pattern formation method employing the same2016
Silicon-containing composition for fine pattern formation and method for fine pa2014
Silicon-based antireflective coating compositions2013
Antireflective coating compositions2012
Hardmask process for forming a reverse tone image using polysilazane2011