Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Aromatic imide compound and method for producing same

Aromatic imide compound and method for producing same

US Patent 9505721 · Granted Nov 29, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Top-layer membrane formation composition and method for forming resist pattern u2019
Block copolymers with surface-active junction groups, compositions and processes2019
Composition for forming overlay film, and resist pattern formation method employ2017
Composition for forming topcoat layer and resist pattern formation method employ2017
Composition for forming topcoat layer and resist pattern formation method employ2016
Composition for forming fine pattern and method for forming fined pattern using 2016
Rinse solution for lithography and pattern formation method employing the same2016
Silicon-containing composition for fine pattern formation and method for fine pa2014
Silicon-based antireflective coating compositions2013
Antireflective coating compositions2012
Hardmask process for forming a reverse tone image using polysilazane2011
Composition for coating over a photoresist pattern comprising a lactam2011