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Home › Photoacid generating composition and sensitizer therefor

Photoacid generating composition and sensitizer therefor

US Patent 5055439 · Granted Oct 8, 1991

Estimated economic value: $19,888,000 ⓘ

Assignee

IBM

Inventors

Robert David Allen (115 patents)
William D. Hinsberg (10 patents)
Logan L. Simpson (20 patents)
Robert J. Twieg (24 patents)
Gregory Michael Wallraff (59 patents)
Carlton G. Willson (42 patents)

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