Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for automatic wafer inspection

Method and apparatus for automatic wafer inspection

US Patent 4618938 · Granted Oct 21, 1986

Estimated economic value: $2,304,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for optical inspection of substrates2002
Alignment correction prior to image sampling in inspection systems2000
Electron beam inspection system and method1996
Automatic high speed optical inspection system1992
Automatic high speed optical inspection system1992
Stable instrument bench with replicated precision surface1991
Method of molding a precision surface on an instrument table1989
Method and apparatus for optical inspection of substrates1989
Rotational and focusing apparatus for turret mounted lenses1987
Electronic control of an automatic wafer inspection system1987
Electronic control of an automatic wafer inspection system1987
Automatic focusing system for a microscope1987