Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Planar multi-level metal process with built-in etch stop

Planar multi-level metal process with built-in etch stop

US Patent 4447824 · Granted May 8, 1984

Estimated economic value: $17,107,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for sequencing items for sale in a live video event2024
Method and apparatus for rotation of a workpiece in supercritical fluid solution2006
Hybrid ceramic electrostatic clamp2004
Guard ring electrostatic chuck2002
Electrostatic chuck with reference electrode2002
Electrostatic chuck and method of manufacture2001
Dielectric-layer for magneto-optic storage media structures2001
Removal of fluorine or chlorine residue by liquid CO.sub.21999
Residue removal by supercritical fluids1999
Electrostatic chuck with ceramic pole protection1999
Electrostatic chuck employing thermoelectric cooling1999
CMOS transistor with two-layer inverse-T tungsten gate1997