Apparatus for performing continuous treatment in vacuum

Assignee

• Hitachi
• Anelva

Inventors

• Hideki Tateishi (8 patents)
• Tsuneaki Kamei (13 patents)
• Katsuo Abe (17 patents)
• Shigeru Kobayashi (77 patents)
• Susumu Aiuchi (22 patents)
• Masashi Nakatsukasa (2 patents)
• Nobuyuki Takahashi (212 patents)
• Ryuji Sugimoto (6 patents)

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