Method for region of interest processing for reticle particle detection

Assignee

• Asml Holding N.V.

Inventors

• Peter Kochersperger (28 patents)
• Christopher Michael DOHAN (2 patents)
• Justin Kreuzer (62 patents)
• Michal Emanuel Pawlowski (9 patents)
• Aage Bendiksen (11 patents)
• Kirill Urievich SOBOLEV (3 patents)
• James H. Walsh (16 patents)
• Roberto B. Wiener (21 patents)
• Arun Mahadevan Venkataraman (6 patents)

View full patent text on Google Patents →