Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Self-referencing integrated alignment sensor

Self-referencing integrated alignment sensor

US Patent 12216414 · Granted Feb 4, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

On chip wafer alignment sensor2025
Method for region of interest processing for reticle particle detection2025
Method for filtering an image and associated metrology apparatus2025
Systems and methods for measuring intensity in a lithographic alignment apparatu2025
Systems and methods for measuring intensity in a lithographic alignment apparatu2025
Systems and methods for measuring intensity in a lithographic alignment apparatu2025
Metrology systems, coherence scrambler illumination sources and methods thereof2025
Contaminant identification metrology system, lithographic apparatus, and methods2025
Lithographic apparatus, metrology systems, illumination switches and methods the2025
Monolithic particle inspection device2025
Monolithic particle inspection device2025
Monolithic particle inspection device2025