Inspection system for edge and bevel inspection of semiconductor structures

Assignee

• Camtek

Inventors

• Carmel Yehuda Drillman (4 patents)
• Mordi Dahan (4 patents)
• Moshe Edri (4 patents)
• Ohad Shimon (2 patents)
• Shimon Koren (12 patents)
• Gil Perlberg (23 patents)

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