Semiconductor inspection tool system and method for wafer edge inspection

Assignee

• Camtek

Inventors

• Carmel Yehuda Drillman (4 patents)
• Moshe Edri (4 patents)
• Menachem Regensburger (15 patents)
• Baheej Bathish (2 patents)
• Mordi Dahan (4 patents)

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