Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High-resolution phase detection method and system based on plane grating laser interferometer

High-resolution phase detection method and system based on plane grating laser interferometer

US Patent 12270645 · Granted Apr 8, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Dynamic visualization method and device for earthquake disasters2025
Exposure light beam phase measurement method in laser interference photolithogra2025
Exposure light beam phase measurement method in laser interference photolithogra2025
Exposure light beam phase measurement method in laser interference photolithogra2025
Exposure light beam phase measurement method in laser interference photolithogra2025
Device and method for regulating and controlling incident angle of light beam in2025
Device and method for regulating and controlling incident angle of light beam in2025
Device and method for regulating and controlling incident angle of light beam in2025
Heterodyne grating interferometry system based on secondary diffraction2025
Heterodyne grating interferometry system based on secondary diffraction2025
Heterodyne grating interferometry system based on secondary diffraction2025
Scanning interference lithographic system2025