Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate cleaning apparatus and cleaning method of substrate

Substrate cleaning apparatus and cleaning method of substrate

US Patent 12100587 · Granted Sep 24, 2024

Estimated economic value: $17,828,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate cleaning apparatus and substrate cleaning method2025
Substrate cleaning apparatus and substrate cleaning method2025
Substrate cleaning apparatus and substrate cleaning method2025
Substrate processing apparatus2025
Substrate cleaning system and substrate cleaning method2025
Cleaning apparatus and polishing apparatus2025
Cleaning apparatus and polishing apparatus2025
Cleaning apparatus and polishing apparatus2025
Cleaning apparatus and polishing apparatus2025
Substrate supporting apparatus and method of controlling substrate supporting ap2024
Jig and installation method using same jig2024
Transport apparatus and substrate processing apparatus2024