Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Heater, temperature control system, and processing apparatus

Heater, temperature control system, and processing apparatus

US Patent 12085338 · Granted Sep 10, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing apparatus and non-transitory computer-readable recording me2025
Image-forming apparatus including process cartridge and device-side terminal con2025
Substrate processing apparatus, substrate processing method, semiconductor devic2025
Substrate processing apparatus, substrate processing method, semiconductor devic2025
Substrate processing apparatus, method of manufacturing semiconductor device and2025
Substrate processing apparatus, method of manufacturing semiconductor device and2025
Substrate processing apparatus, method of manufacturing semiconductor device and2025
Substrate processing apparatus, method of manufacturing semiconductor device and2025
Substrate processing apparatus and ceiling heater2025
Substrate processing apparatus, and thermocouple2024
Substrate temperature sensor, substrate retainer and substrate processing appara2024
Substrate processing apparatus and non-transitory computer-readable recording me2023