Assignee
- Tokyo Electron Limited
- National University Corporation Tokai National Higher Education And Research System
Inventors
- Masaru Hori (55 patents)
- Makoto Sekine (42 patents)
- Hirotsugu Sugiura (10 patents)
- Tsuyoshi Moriya (106 patents)
- Satoshi Tanaka (768 patents)
- Yoshinori Morisada (21 patents)