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Home › Geometry based three dimensional reconstruction of a semiconductor specimen by solving an optimization problem, using at least two SEM images acquired at different illumination angles

Geometry based three dimensional reconstruction of a semiconductor specimen by solving an optimization problem, using at least two SEM images acquired at different illumination angles

US Patent 11953316 · Granted Apr 9, 2024

Estimated economic value: $47,694,000 ⓘ

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