Gas delivery system for a shared gas delivery architecture

Assignee

• Applied Materials

Inventors

• Arun Chakravarthy Chakravarthy (8 patents)
• Chahal Neema (3 patents)
• Abhijit A. Kangude (15 patents)
• Elizabeth Neville (8 patents)
• Vishal Suresh Jamakhandi (3 patents)
• Kurt R. Langeland (2 patents)
• Syed A. Alam (3 patents)
• Ming Xu (49 patents)
• Kenneth Le (8 patents)

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