Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for and method of controlling an energy spread of a charged-particle beam

Apparatus for and method of controlling an energy spread of a charged-particle beam

US Patent 11881374 · Granted Jan 23, 2024

Estimated economic value: $126,669,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Fabrication process deviation determination method, calibration method, inspecti2025
Method and apparatus for inspection2025
First support assembly, support assembly system, display apparatus and double-si2025
Charged particle optical device, objective lens assembly, detector, detector arr2025
Charged particle device, detector, and methods2025
Method and apparatus for forming a patterned layer of material2025
Inspection system, lithographic apparatus, and inspection method2025
Inspection system, lithographic apparatus, and inspection method2025
Backlight module and display device including the same2025
Numerically compensating SEM-induced charging using diffusion-based model2025
Display device2025
Apparatus for and method of local control of a charged particle beam2025