Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Numerically compensating SEM-induced charging using diffusion-based model

Numerically compensating SEM-induced charging using diffusion-based model

US Patent 12255042 · Granted Mar 18, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Fabrication process deviation determination method, calibration method, inspecti2025
Optically determining electrical contact between metallic features in different 2024
Apparatus for and method of controlling an energy spread of a charged-particle b2024
Method of metrology and associated apparatuses2023
Inspection tool and inspection method2023
Inspection tool, lithographic apparatus, electron beam source and an inspection 2022
Method of metrology and associated apparatuses2021