Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of metrology and associated apparatuses

Method of metrology and associated apparatuses

US Patent 11733614 · Granted Aug 22, 2023

Estimated economic value: $56,750,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for calibrating simulation process based on defect-based process window2025
Method for determining defectiveness of pattern based on after development image2025
Method in the manufacturing process of a device, a non-transitory computer-reada2025
Numerically compensating SEM-induced charging using diffusion-based model2025
Method of wafer alignment using at resolution metrology on product features2024
Particle beam apparatus, defect repair method, lithographic exposure process and2024
Method for calibrating a scanning charged particle microscope2024
Method for characterizing a manufacturing process of semiconductor devices2024
Method for controlling a manufacturing process and associated apparatuses2023
Inspection tool and inspection method2023
Inspection tool and inspection method2023
Method for calibrating a scanning charged particle microscope2023