Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Batch substrate support with warped substrate capability

Batch substrate support with warped substrate capability

US Patent 11784075 · Granted Oct 10, 2023

Estimated economic value: $39,034,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

On-board cleaning of tooling parts in hybrid bonding tool2025
Shutter disk2024
High conductance inner shield for process chamber2024
Preclean chamber upper shield with showerhead2024
Low warpage curing methodology by inducing curvature2024
Methods and apparatus for reducing defects in preclean chambers2024
Solid-state power amplifiers with cooling capabilities2024
Multi-chamber substrate processing platform2024
Shutter disk2024
Bio-lubricant with high viscosity and method2023
Water cooled plate for heat management in power amplifiers2023
Water cooled plate for heat management in power amplifiers2023