{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Modular microwave source with local lorentz force", "item": "https://www.patentleaderboard.com/patent/11721532"}]}
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Home › Modular microwave source with local lorentz force

Modular microwave source with local lorentz force

US Patent 11721532 · Granted Aug 8, 2023

Estimated economic value: $46,911,000 ⓘ

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