Five-degree-of-freedom heterodyne grating interferometry system

Assignee

• Beijing U-Precision Tech Co.
• Tsinghua University

Inventors

• Ming Zhang (48 patents)
• Yu Zhu (66 patents)
• Fuzhong Yang (4 patents)
• Leijie Wang (17 patents)
• Rong Cheng (27 patents)
• Xin Li (103 patents)
• Weinan Ye (7 patents)
• Jinchun Hu (26 patents)

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