Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate defect inspection method and substrate defect inspection apparatus

Substrate defect inspection method and substrate defect inspection apparatus

US Patent 11624712 · Granted Apr 11, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reflective mask blank, and method for manufacturing reflective mask2025
Reflective mask blank, and method for manufacturing reflective mask2025
Reflective mask blank and reflective mask2024
Reflective mask blank and reflective mask2024
Reflective mask blank, method of manufacturing thereof, and reflective mask2024
Defect inspection apparatus, method for inspecting defect, and method for manufa2024
Substrate with multilayer reflection film for EUV mask blank, manufacturing meth2024
Substrate with multilayer reflection film for EUV mask blank, manufacturing meth2024
Substrate with multilayer reflection film for EUV mask blank, manufacturing meth2024
Substrate with multilayer reflection film for EUV mask blank, manufacturing meth2023
Substrate with multilayer reflection film for EUV mask blank, manufacturing meth2023
Substrate with multilayer reflection film for EUV mask blank, manufacturing meth2023