Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Systems for cooling RF heated chamber components

Systems for cooling RF heated chamber components

US Patent 11495441 · Granted Nov 8, 2022

Estimated economic value: $288,616,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Tunability of edge plasma density for tilt control2025
Radiofrequency signal filter arrangement for plasma processing system2025
Methods and systems for managing byproduct material accumulation during plasma-b2025
Substrate location detection and adjustment2025
Low frequency RF generator and associated electrostatic chuck2025
Systems and methods for controlling a plasma sheath characteristic2025
Systems and methods for optimizing power delivery to an electrode of a plasma ch2025
Electrostatic edge ring mounting system for substrate processing2025
Metal contamination reduction in substrate processing systems with transformer c2025
Distortion of pulses for wafer biasing2025
Systems and methods for use of low frequency harmonics in bias radiofrequency su2025
Method and system for automated frequency tuning of radiofrequency (RF) signal g2025