Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Measurement apparatus for measuring a wavefront aberration of an imaging optical system

Measurement apparatus for measuring a wavefront aberration of an imaging optical system

US Patent 11441970 · Granted Sep 13, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and device for calibrating a diffractive measuring structure2022
Appliance for the moiré measurement of an optical test object2021
Microlithographic projection exposure apparatus and measuring device for a proje2019
Projection exposure apparatus and method for measuring an imaging aberration2019
Apparatus for determining an optical property of an optical imaging system2018
Apparatus for determining an optical property of an optical imaging system2018
Measuring system for measuring an imaging quality of an EUV lens2016
Measuring system for measuring an imaging quality of an EUV lens2016
Measuring system2016
Exposure apparatus and measuring device for a projection lens2016
System for measuring the image quality of an optical imaging system2016
Device and method for the optical measurement of an optical system by using an i2014