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Home › Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device

Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device

US Patent 11437264 · Granted Sep 6, 2022

Assignee

Samsung

Inventors

Jung-Mo Sung (6 patents)
Jong-Woo Sun (21 patents)
Je-Woo Han (22 patents)
Chan Hoon Park (23 patents)
Seung-Yoon Song (4 patents)
Seul Ha Myung (3 patents)

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