Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Segmented stress decoupling via frontside trenching

Segmented stress decoupling via frontside trenching

US Patent 11247895 · Granted Feb 15, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Differential gas sensor with two sensor components and use for detection of gase2025
Pressure sensors and method for forming a MEMS pressure sensor2025
MEMS devices with support structures and associated production methods2025
Quantum conveyor and methods of producing a quantum conveyor2024
Integration of stress decoupling and particle filter on a single wafer or in com2022
Integration of stress decoupling and particle filter on a single wafer or in com2022
Pressure sensors and method for forming a MEMS pressure sensor2021
Integration of stress decoupling and particle filter on a single wafer or in com2021
Integration of stress decoupling and particle filter on a single wafer or in com2021
Stressed decoupled micro-electro-mechanical system sensor2020
Deposition of protective material at wafer level in front end for early stage pa2020
Mechanical stress decoupling for microelectromechanical systems (MEMS) elements 2020