Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195325 | MEMS devices with support structures and associated production methods | — | 2025-01-14 |
| 11505450 | Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package | Christian Geissler, Robert Gruenberger, Claus Waechter, Bernhard Winkler | 2022-11-22 |
| 11247895 | Segmented stress decoupling via frontside trenching | Robert Gruenberger, Wolfram Langheinrich | 2022-02-15 |
| 10996125 | Pressure sensors and method for forming a MEMS pressure sensor | Markus Eckinger, Dirk Hammerschmidt, Bernhard Winkler | 2021-05-04 |
| 10899604 | Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package | Christian Geissler, Robert Gruenberger, Claus Waechter, Bernhard Winkler | 2021-01-26 |
| 10858245 | Deposition of protective material at wafer level in front end for early stage particle and moisture protection | Manfred Fries, Franz-Peter Kalz | 2020-12-08 |
| 10843916 | Mechanical stress decoupling for microelectromechanical systems (MEMS) elements with gel-filling | Dirk Meinhold, Robert Gruenberger, Wolfram Langheinrich, Sebastian Luber, Roland Meier +1 more | 2020-11-24 |
| 10807862 | Segmented stress decoupling via frontside trenching | Robert Gruenberger, Wolfram Langheinrich | 2020-10-20 |
| 10370244 | Deposition of protective material at wafer level in front end for early stage particle and moisture protection | Manfred Fries, Franz-Peter Kalz | 2019-08-06 |
| 8552317 | Metal-encapsulated, polyphase, gas-insulated busbar switch disconnector and earthing switch | Daniel Zwicky, David Saxl, Michael Mann, Daniel Kuhl | 2013-10-08 |