Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer spot heating with beam width modulation

Wafer spot heating with beam width modulation

US Patent 11177144 · Granted Nov 16, 2021

Estimated economic value: $84,921,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Layer with discrete islands formed on a substrate support2025
Air shrouds with integrated heat exchanger2025
Fast switching gas circuits and processing chambers, and related methods and app2025
Supply system for low volatility precursors2025
Methods of correlating zones of processing chambers, and related systems and met2025
Methods of correlating zones of processing chambers, and related systems and met2025
Support ring with plasma spray coating2025
Methods for detection using optical emission spectroscopy2025
Methods for detection using optical emission spectroscopy2025
Methods for detection using optical emission spectroscopy2025
Methods for detection using optical emission spectroscopy2025
Methods for detection using optical emission spectroscopy2025