Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of classifying defects in a semiconductor specimen and system thereof

Method of classifying defects in a semiconductor specimen and system thereof

US Patent 11151706 · Granted Oct 19, 2021

Estimated economic value: $109,516,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Defect offset correction for examination of semiconductor specimens2025
Defect examination on a semiconductor specimen2025
Machine learning-based classification of defects in a semiconductor specimen2025
Machine learning-based classification of defects in a semiconductor specimen2025
Method of deep learning-based examination of a semiconductor specimen and system2024
Mask inspection of a semiconductor specimen2024
Selecting a representative subset of potential defects to improve defect classif2024
Detecting defects in semiconductor specimens using weak labeling2023
Determining a critical dimension variation of a pattern2023
Method of deep learning-based examination of a semiconductor specimen and system2023
Method of deep learning-based examination of a semiconductor specimen and system2023
Method of defect classification and system thereof2022