Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Mask inspection of a semiconductor specimen

Mask inspection of a semiconductor specimen

US Patent 11983867 · Granted May 14, 2024

Estimated economic value: $61,768,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Defect offset correction for examination of semiconductor specimens2025
Mask inspection for semiconductor specimen fabrication2025
Mask inspection for semiconductor specimen fabrication2025
Defect examination on a semiconductor specimen2025
Machine learning-based classification of defects in a semiconductor specimen2025
Mask inspection for semiconductor specimen fabrication2025
Mask inspection for semiconductor specimen fabrication2025
Method of deep learning-based examination of a semiconductor specimen and system2024
Accessories for optical spectrometers2024
Selecting a representative subset of potential defects to improve defect classif2024
Detecting defects in semiconductor specimens using weak labeling2023
Determining a critical dimension variation of a pattern2023