Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Manufacturing methods for mandrel pull from spacers for multi-color patterning

Manufacturing methods for mandrel pull from spacers for multi-color patterning

US Patent 11127594 · Granted Sep 21, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Extreme ultraviolet lithography patterning method2025
Patterning features with metal based resists2025
Metal hard mask integration2025
Coaxial filter and communication radio frequency device2025
Sacrificial capping layer for gate protection2025
In-situ focus ring coating2025
Variable hardness amorphous carbon mask2025
Plasma etching tools and systems2025
Method for patterning a substrate using photolithography2025
Pitch scaling in microfabrication2025
Pre-etch treatment for metal etch2025
Method of forming a FET structure by selective deposition of film on source/drai2025