Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › In-situ focus ring coating

In-situ focus ring coating

US Patent 12354842 · Granted Jul 8, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Sacrificial capping layer for gate protection2025
Variable hardness amorphous carbon mask2025
Plasma etching tools and systems2025
Plasma etching tools and systems2025
Method of forming a FET structure by selective deposition of film on source/drai2025
Sacrificial capping layer for contact etch2025
Forming a semiconductor device using a protective layer2025
Recessed contact structures and methods2025
Contact openings in semiconductor devices2025
Methods for forming self-aligned contacts using spin-on silicon carbide2024
Technologies for high aspect ratio carbon etching with inserted charge dissipati2024
Technologies for high aspect ratio carbon etching with inserted charge dissipati2024