Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of manufacturing devices

Method of manufacturing devices

US Patent 11087065 · Granted Aug 10, 2021

Estimated economic value: $38,498,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for controlling a manufacturing process and associated apparatuses2025
In-resist process for high density contact formation2025
Method for calibrating simulation process based on defect-based process window2025
Method for determining defectiveness of pattern based on after development image2025
Method of determining control parameters of a device manufacturing process2025
Voltage contrast metrology mark2024
Metrology apparatus and method for determining a characteristic of one or more s2024
Method of manufacturing devices2024
Method of manufacturing devices2024
Process window based on defect probability2023
Process window based on defect probability2023
Methods and systems for inspecting integrated circuits based on X-rays2023