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Home › Two-color self-aligned double patterning (SADP) to yield static random access memory (SRAM) and dense logic

Two-color self-aligned double patterning (SADP) to yield static random access memory (SRAM) and dense logic

US Patent 11062911 · Granted Jul 13, 2021

Estimated economic value: $21,953,000 ⓘ

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