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Home › Techniques for monolithic co-integration of polycrystalline thin-film bulk acoustic resonator devices and monocrystalline III-N semiconductor transistor devices

Techniques for monolithic co-integration of polycrystalline thin-film bulk acoustic resonator devices and monocrystalline III-N semiconductor transistor devices

US Patent 11056532 · Granted Jul 6, 2021

Estimated economic value: $31,309,000 ⓘ

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