Ion beam quality control using a movable mass resolving device

Assignee

• Varian Semiconductor Equipment Associates

Inventors

• Bon-Woong Koo (78 patents)
• Robert C. Lindberg (23 patents)
• Eric D. Hermanson (38 patents)
• Frank Sinclair (139 patents)
• Antonella Cucchetti (15 patents)
• Randy Martin (11 patents)
• Michael D. Johnson (66 patents)
• Ana Samolov (5 patents)
• Svetlana B. Radovanov (54 patents)

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